Brooks - CTI Cryogenics

Brooks - CTI Cryogenics

Brooks AutomationCTI-Cryogenics is the global leader in cryogenic high-vacuum technology. CTI builds a broad array of compressors, cryopumps, and cryopump systems design ed to deliver exceptional performance, reliability, and productivity. Product line includes:

On Board Cryopumps

  • CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
  • Consistent process performance
  • Higher tool productivity via significantly increased cryopump uptime
  • Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
  • Fast Regen capability extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
  • GOLDLink® compatible for productivity protection 24/7, worldwide
  • Backed by legendary Helix service and support, worldwide.

Cryopump Model Chart

On-Board Waterpumps

  • 50% to 75% reduction in time to base pressure
  • Higher yields through reduced water vapor and lower contamination
  • Temperature control for selective water vapor pumping. No gate valve required
  • Low-cost installation and operation
  • Advanced On-Board control system for process optimization and monitoring, predictive maintenance, network pump management, and ease of use
  • Compatibility with other On-Board pumps

Cryo-Torr Cryopumps

  • CTI Cryogenics’ original cryogenic high-vacuum pump
  • Dependable bottom-line performance
  • Add your own customized controls and supporting peripherals
  • Clean, reliable high speed pumping for critical vacuum process applications
  • Fast maintenance and low operating costs

Cryo-Torr Cryopump Model

Cryo-Torr 20HP High Performance Cryopump

  • Extreme high pumping speeds insure faster pump down times
  • New cryogenic refrigerator design allows for high temperature operation and greater vacuum reliability
  • Oil-free operation eliminates high LN2 costs while providing better vacuum quality
  • Fast and easy maintenance
  • Perfect solution for metal deposition, optical coating, space simulation and other applications, such as, flat panel display manufacturing.

Performance and Features Chart

Compressors

8200 Compressor:

  • Optimum performance with On-Board Cryopumps, Waterpumps and Cryo-Torr Cryopumps
  • Supports all pumps up to 8 inches
  • Designed for flexibility

9600 Compressor:

  • Designed for upscale life, high reliability, and easy use
  • Outstanding performance with all Cryo-Torr Cryopumps, On-Board Cryopumps, WAterpumps, and TurboPlus Vacuum Pumps
  • Supports both singe and grouped pump configuration and is compatible with new and existing CTI Cryogenics pumping installations.

9700A Compressor:

  • Based on the 9600 Compressor platform
  • Incrased helium output
  • Ideal for operating multiple cryopumps

Cryodyne Refrigerators

  • Made up of a family of two stage, closed cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle
  • Offers usable heat lift from <10K to >80L for a variety of research and commercial applications

Refrigeration system consists of a refrigerator assembly, compressor assembly and customized installation kit, including, flexible interconnecting gas lines and refrigerator cable ranging from the standard 10-foot separation length up to 300-foot lengths.